半导体产业作为一个起源于国外的技术,很多相关的技术术语都是用英文表述。且由于很多从业者都有海外经历,或者他们习惯于用英文表述相关的工艺和技术节点,那就导致很多的英文术语被翻译为中文之后,很多人不能对照得上,或者不知道怎么翻译。在这里我们整理一些常用的半导体术语的中英文版本,希望对大家有所帮助。如果当中有出错,请帮忙纠正,谢谢! : H% l# a& [% G% k. P/ t 常用半导体中英对照表离子注入机 ion implanterLSS理论 Lindhand SchaRFf and SchIoTt theory,又称“林汉德-斯卡夫-斯高特理论”。' d2 _$ D" L/ }* h' a" n: I 沟道效应 channeling effect射程分布 range distribution深度分布 depth distribution投影射程 projected range阻止距离 stopping distance阻止本领 stopping power标准阻止截面 standard stopping cross section 退火 annealing激活能 activation energy等温退火 isothermal annealing激光退火 laser annealing应力感生缺陷 stress-induced defect择优取向 preferred orientation制版工艺 mask-making technology 图形畸变 pattern distortion初缩 first minification精缩 final minification母版 master mask铬版 chromium plate干版 dry plate乳胶版 emulsion plate透明版 see-through plate高分辨率版 high resolution plate, HRP超微粒干版 plate for ultra-microminiaturization% U! f0 T4 G9 l$ s/ J. F 掩模 mask掩模对准 mask alignment对准精度 alignment precision光刻胶 photoresist,又称“光致抗蚀剂”。负性光刻胶 negative photoresist正性光刻胶 positive photoresist无机光刻胶 inorganic resist多层光刻胶 multilevel resist电子束光刻胶 electron beam resist X射线光刻胶 X-ray resist刷洗 scrubbing甩胶 spinning涂胶 photoresist coating后烘 postbaking光刻 photolithographyX射线光刻 X-ray lithography电子束光刻 electron beam lithography 离子束光刻 ion beam lithography深紫外光刻 deep-UV lithography光刻机 mask aligner投影光刻机 projection mask aligner曝光 exposure 接触式曝光法 contact exposure method接近式曝光法 proximity exposure method光学投影曝光法 optical projection exposure method电子束曝光系统 electron beam exposure system分步重复系统 step-and-repeat system 显影 development线宽 linewidth去胶 stripping of photoresist氧化去胶 removing of photoresist by oxidation等离子[体]去胶 removing of photoresist by plasma 刻蚀 etching干法刻蚀 dry etching反应离子刻蚀 reactive ion etching, RIE各向同性刻蚀 isotropic etching各向异性刻蚀 anisotropic etching反应溅射刻蚀 reactive sputter etching离子铣 ion beam milling,又称“离子磨削”。等离子[体]刻蚀 plasma etching6 Z% |6 K4 n/ y/ i% d 钻蚀 undercutting剥离技术 lift-off technology,又称“浮脱工艺”。终点监测 endpoint monitoring金属化 metallization互连 interconnection多层金属化 multilevel metallization. r0 Q3 m4 @& G) K: m/ k" T$ C 电迁徙 electromigration回流 reflow磷硅玻璃 phosphorosilicate glass硼磷硅玻璃 boron-phosphorosilicate glass钝化工艺 passivation technology多层介质钝化 multilayer dielectric passivation 划片 scribing电子束切片 electron beam slicing烧结 sintering印压 indentation热压焊 thermocompression bonding热超声焊 thermosonic bonding& ]5 D! X7 v0 {# l; ^4 X0 O 冷焊 cold welding点焊 spot welding球焊 ball bonding楔焊 wedge bonding内引线焊接 inner lead bonding外引线焊接 outer lead bonding2 a5 q7 w, Z$ O! T 梁式引线 beam lead装架工艺 mounting technology附着 adhesion封装 packaging金属封装 metallic packaging陶瓷封装 ceramic packaging/ D0 {( Q a. e* q 扁平封装 flat packaging塑封 plastic package玻璃封装 glass packaging微封装 micropackaging,又称“微组装”。0 E$ c6 F, [, a- y& M+ z% L 管壳 package管芯 die引线键合 lead bonding引线框式键合 lead frame bonding带式自动键合 tape automated bonding, TAB8 o# [8 d4 r# Y 激光键合 laser bonding超声键合 ultrasonic bonding红外键合 infrared bonding 微电子辞典大集合(按首字母顺序排序) A+ y" h% X2 j7 q! ]: b, _$ K9 j Abrupt junction 突变结 Accelerated testing 加速实验 Acceptor 受主 Acceptor atom 受主原子: U) w. B |- ?- q; o: Q Accumulation 积累、堆积) y3 X3 a' r% ?( D- L% [ Accumulating contact 积累接触' _- ?. F& Y1 T7 _9 {( u$ W: d Accumulation region 积累区 Accumulation layer 积累层- a8 f: p1 h. \8 i& l! j- j$ O5 v4 f Active region 有源区 Active component 有源元 Active device 有源器件 Activation 激活5 b* e% M6 c; H8 z; [+ | Activation energy 激活能+ v0 z$ A' ]! B; i1 } Active region 有源(放大)区0 C! ]1 ]2 a2 r) T& z; H Admittance 导纳 e, K6 V) \) d9 N2 j8 V1 ^ Allowed band 允带 Alloy-junction device合金结器件 Aluminum(Aluminium) 铝: a0 I% O* ~# o2 I% o4 [ Aluminum – oxide 铝氧化物7 a9 ~: Y7 I3 L- q4 z Aluminum passivation 铝钝化 Ambipolar 双极的 Ambient temperature 环境温度- ^8 I& T: ~' O5 ` Amorphous 无定形的,非晶体的 Amplifier 功放 扩音器 放大器9 o! y7 S# q+ h. }# B* } Analogue(Analog) comparator 模拟比较器 . H' Y7 a; X- P Angstrom 埃Anneal 退火 Anisotropic 各向异性的) e- s* |2 `- d) J' O$ A Anode 阳极 Arsenic (AS) 砷 Auger 俄歇 Auger process 俄歇过程. `+ i( l5 _, P* z$ P Avalanche 雪崩 Avalanche breakdown 雪崩击穿 Avalanche excitation雪崩激发B Background carrier 本底载流子 Background doping 本底掺杂. s9 Y/ o# R" a9 u Backward 反向 Backward bias 反向偏置# A. w. C! w9 D; P1 B2 g Ballasting resistor 整流电阻 Ball bond 球形键合 Band 能带: M. ?# f4 b1 n% l+ g2 l2 e Band gap 能带间隙" ?% m3 U Y) b$ A C* J Barrier 势垒( [% }9 w7 B& l* |( i Barrier layer 势垒层2 D4 Y' P1 x! y4 q5 v. d- Q1 y* r Barrier width 势垒宽度 V* x. C- C S3 s: Y+ ]" d8 A+ u8 M Base 基极 Base contact 基区接触! C# X' W7 B, R' t" Y1 n Base stretching 基区扩展效应' F9 |5 f. _) b) T- Q Base transit time 基区渡越时间9 G) ?+ g+ |" n5 J* C0 [; {+ H Base transport efficiency基区输运系数8 L: o/ N+ Y$ s Base-width modulation基区宽度调制 Basis vector 基矢 Bias 偏置 Bilateral switch 双向开关( J7 j0 J0 k, f9 G4 ~- q( g" N Binary code 二进制代码3 x! P# q$ b: n7 q" n% a" K& L) B Binary compound semiconductor 二元化合物半导体! T4 A# t8 `/ @ x! a8 X! C( z Bipolar 双极性的# v, `; [( f5 r Bipolar Junction Transistor (BJT)双极晶体管 Bloch 布洛赫, ^. ^& S" b% f6 y8 \9 r8 j Blocking band 阻挡能带. {* j/ F: }' T Blocking contact 阻挡接触 Body - centered 体心立方 Body-centred cubic structure 体立心结构 Boltzmann 波尔兹曼; M8 s0 F* h2 c# ` ^% Y3 s Bond 键、键合; z. O3 ~6 i, }2 V Bonding electron 价电子; {" V# z9 \( X5 |* D3 H3 { Bonding pad 键合点% D5 Q( ^& E# ` Bootstrap circuit 自举电路Bootstrapped emitter follower 自举射极跟随器- C3 ?- A) |5 ` j j Boron 硼 Borosilicate glass 硼硅玻璃8 w3 |" H# U) T* [* ^3 D' o+ V Boundary condition 边界条件9 ?6 S1 v j$ k' l, V Bound electron 束缚电子 Breadboard 模拟板、实验板 Break down 击穿% v+ L& I1 p9 E$ B% M* E4 D Break over 转折 Brillouin 布里渊 Brillouin zone 布里渊区0 T9 }( i8 { Y8 o Built-in 内建的! Q" ~( B5 { g Build-in electric field 内建电场. v* x# |, {$ B R4 s Bulk 体/体内 Bulk absorption 体吸收Bulk generation 体产生 Bulk recombination 体复合 Burn - in 老化1 Y( [ g8 o5 O, Y0 B Burn out 烧毁 Buried channel 埋沟 Buried diffusion region 隐埋扩散区C Can 外壳0 ~9 Y( }4 f W- [2 ~2 H Capacitance 电容 Capture cross section 俘获截面& Z7 k4 l M, h- N! F Capture carrier 俘获载流子 Carrier 载流子、载波& b7 k' S) F. b) s2 _1 u+ M Carry bit 进位位 Carry-in bit 进位输入 Carry-out bit 进位输出5 y- i- X; @, o! ^! S; K) [ Cascade 级联3 d6 |3 D4 ~% u5 T5 A Case 管壳 Cathode 阴极 Center 中心 Ceramic 陶瓷(的) Channel 沟道Channel breakdown 沟道击穿 Channel current 沟道电流 Channel doping 沟道掺杂 Channel shortening 沟道缩短8 ^( [7 x$ s* ?, i5 l- ^ Channel width 沟道宽度 E* ?/ j8 z# q5 r Characteristic impedance 特征阻抗/ l, Z- j2 B+ D" w* B, c4 @ Charge 电荷、充电9 a; j3 d, W- u w- [0 F Charge-compensation effects 电荷补偿效应 J# z- I7 n; C, U2 z: t Charge conservation 电荷守恒 Charge neutrality condition 电中性条件, A6 X7 C. ~2 h3 A9 [; P1 T0 n Charge drive/exchange/sharing/transfer/storage 电荷驱动/交换/共享/转移/存储 Chemmical etching 化学腐蚀法* }: ?: j& U: L6 N) J% b: I8 l% ? Chemically-Polish 化学抛光 Chemmically-Mechanically Polish (CMP) 化学机械抛光 Chip 芯片) d4 w; E9 m5 P; \5 v% Z/ h Chip yield 芯片成品率 Clamped 箝位. @4 D9 x9 |3 z. o) o Clamping diode 箝位二极管9 [& |3 _8 S: i4 G# Z4 ? Cleavage plane 解理面 Clock rate 时钟频率: [( m% |: K! p" [. v Clock generator 时钟发生器 Clock flip-flop 时钟触发器/ w1 u; E/ A) I- f! ?* I; b0 ~1 q Close-packed structure 密堆积结构4 K' C/ @0 q6 t7 V0 s/ X Close-loop gain 闭环增益! c+ u' v/ R% i( @& n: T Collector 集电极 Collision 碰撞6 X" O" g! R8 N6 A Compensated OP-AMP 补偿运放. Z1 t5 D2 \$ U6 i0 R Common-base/collector/emitter connection 共基极/集电极/发射极连接 Common-gate/drain/source connection 共栅/漏/源连接- x: y! ~9 h3 k8 p V Common-mode gain 共模增益; _: w' x0 B* I! A Common-mode input 共模输入# W1 J; Q8 J* L0 M# S( Z( C+ I5 ~+ R/ C Common-mode rejection ratio (CMRR) 共模抑制比 Compatibility 兼容性 Compensation 补偿 Compensated impurities 补偿杂质 }( H( U5 W# }/ _+ X Compensated semiconductor 补偿半导体" f) G* m) l' m3 I! Y( m$ _ Complementary Darlington circuit 互补达林顿电路, V0 j A. q# G' H3 ^# c Complementary Metal-Oxide-Semiconductor Field-Effect-Transistor(CMOS) 互补金属氧化物半导体场效应晶体管 Complementary error function 余误差函数 Computer-aided design (CAD)/test(CAT)/manufacture(CAM) 计算机辅助设计/ 测试 /制造7 q" S. ^( J B Compound Semiconductor 化合物半导体/ N# h- B9 c. z8 n) t" P3 T, F Conductance 电导. t \, y; W- h. }$ A/ o, q- M2 m Conduction band (edge) 导带(底)! u. Z5 a4 u3 u! O+ x; K+ O Conduction level/state 导带态 Conductor 导体" j3 E* q5 ] [5 i, e( D, J Conductivity 电导率 Configuration 组态$ ^3 w' m- V/ p& t' q8 ` b Conlomb 库仑. n& ~5 g% }* x5 d; t# A Conpled Configuration Devices 结构组态) ]+ I) v( N3 v$ Z; D Constants 物理常数 Constant energy suRFace 等能面 Constant-source diffusion恒定源扩散 Contact 接触 Contamination 治污 Continuity equation 连续性方程: I" Q; Q" w# L: _4 N7 z3 s3 F Contact hole 接触孔 Contact potential 接触电势# c9 @8 h& [6 n% h6 v( l+ \: y Continuity condition 连续性条件+ c/ l& Q' g* }6 O f4 R Contra doping 反掺杂/ `% J" G0 s9 R, Z- ]6 @ Controlled 受控的 Converter 转换器% {& A0 K9 Q0 A2 b6 Q: q% d Conveyer 传输器8 C% J& A) ~9 S6 ~& M Copper interconnection system 铜互连系统 Couping 耦合2 \6 q7 q0 H) B/ P/ |4 O- i Covalent 共阶的6 U# P, Q k, z Crossover 跨交9 g/ g4 D/ v0 Y1 }. m Critical 临界的+ @- M: x+ V* l& ]5 Y$ N Crossunder 穿交( C }9 ]7 B% X! L6 _- x( W Crucible坩埚 Crystal defect/face/orientation/lattice 晶体缺陷/晶面/晶向/晶格 Current density 电流密度 Curvature 曲率 Cut off 截止8 `5 R$ f; L9 h# F Current drift/dirve/sharing 电流漂移/驱动/共享' E4 _, t! D6 ^' ^ Current Sense 电流取样 Curvature 弯曲# A; X- ?$ ^5 S Custom integrated circuit 定制集成电路7 a0 `; x6 f9 F/ Y; I# R. m/ L Cylindrical 柱面的 Czochralshicrystal 直立单晶 Czochralski technique 切克劳斯基技术(Cz法直拉晶体J)D Dangling bonds 悬挂键) {% N0 k4 R; P/ f+ ~9 n Dark current 暗电流 Dead time 空载时间1 t }5 W& Z7 W; Q% {% f4 |+ z Debye length 德拜长度: h2 R3 r5 F# t De.broglie 德布洛意! m' |! m/ J+ P, d8 x0 ^ Decderate 减速 R* Y6 q; y y Decibel (dB) 分贝; g! W: C- A$ O( b Decode 译码2 A1 y9 u6 \; w8 L Deep acceptor level 深受主能级 Deep donor level 深施主能级 Deep impurity level 深度杂质能级1 y1 w2 G: \* \7 m: b8 |2 z8 \ Deep trap 深陷阱6 G9 E: h/ m( E Defeat 缺陷7 K3 P9 ]1 ^& I6 A& l5 o" S( p" q Degenerate semiconductor 简并半导体Degeneracy 简并度 Degradation 退化 Degree Celsius(centigrade) /Kelvin 摄氏/开氏温度8 k: V' p, X) i: G Delay 延迟 Density 密度1 U1 a7 T3 Q- f' F Density of states 态密度 Depletion 耗尽 Depletion approximation 耗尽近似" w+ Z5 Y9 u I+ t' x Depletion contact 耗尽接触( ~6 g: ^) o l) L' q* p& X Depletion depth 耗尽深度. v' S& [; S7 Y" t; L- n Depletion effect 耗尽效应, j+ h5 u: s% ^& k& x Depletion layer 耗尽层 Depletion MOS 耗尽MOS* b: [- l+ A8 Q3 R( h6 T Depletion region 耗尽区 Deposited film 淀积薄膜8 z# {# E) D" @3 |& y7 y9 T Deposition process 淀积工艺7 ~% C' X5 @+ Z) k6 y& i Design rules 设计规则 Die 芯片(复数dice)& X) ~9 j, r* L5 E5 o Diode 二极管# V/ g# M# ~( s Dielectric 介电的8 S: }$ R2 R$ v+ h1 I! c Dielectric isolation 介质隔离 Difference-mode input 差模输入 Differential amplifier 差分放大器4 t, L4 c" S+ g% [# _5 Q8 _( x0 o Differential capacitance 微分电容 Diffused junction 扩散结 Diffusion 扩散0 @3 D' l# P+ Q6 u7 l3 Z, { Diffusion coefficient 扩散系数" {2 s# d' u; U% L3 F Diffusion constant 扩散常数 Diffusivity 扩散率 Diffusion capacitance/barrier/current/furnace 扩散电容/势垒/电流/炉) k2 I: z6 |. e( P h Digital circuit 数字电路 Dipole domain 偶极畴 Dipole layer 偶极层 Direct-coupling 直接耦合) \- U; _; E H# f6 o8 u Direct-gap semiconductor 直接带隙半导体+ H/ e. x9 r+ }5 e' X Direct transition 直接跃迁/ `3 i* P7 L' o z0 }& M3 n& q Discharge 放电$ X X) a7 @9 F) ~5 I4 k j4 Y Discrete component 分立元件8 |7 V6 j9 A$ a Dissipation 耗散 |
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